Magic Prime Square

$\left[\begin{array}{cccc}11& 29& 43& 73\\ 31& 67& 17& 41\\ 61& 13& 59& 23\\ 53& 47& 37& 19\end{array}\right]$ is the first (in lexicographic order) $4\times 4$ magic square using the smallest distinct prime numbers $>10$.

Find the first (in lexicographic order) $4\times 4$ magic square using the smallest distinct prime numbers $>100$.

Answer format: comma separated list of the matrix elements

Example : 11,29,43,73,31,67,17,41,61,13,59,23,53,47,37,19

[My timing : 70 sec]